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Fabrication and thermal characteristics of Ti-Ag-Ni coated regenerated grating sensors for high-temperature sensing

机译:用于高温传感的Ti-Ag-Ni涂层再生光栅传感器的制备和热特性

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A regenerated grating (RG) sensor with titanium (Ti) - silver (Ag) - nickel (Ni) multilayer coatings is fabricated by magnetron sputtering and electroplating processes. Optical and thermal testing are performed to evaluate the characteristics of the Ti-Ag-Ni coated RG sensor. The profiles of the reflection spectra of the RG are slightly affected by the metallization process. The shift in the Bragg wavelength of the Ti-Ag-Ni coated RG sensor can be described as a piecewise linear function of temperature, with slope discontinuity at 250 °C. The Ti-Ag-Ni coated RG sensor exhibits more than twice higher sensitivity than that of the bare RG, with satisfactory repeatability and stability at temperatures of up to 600 °C. The surface and cross-section of the sensor are observed with scanning electron microscopy (SEM). The SEM images clear show no discontinuity at the interface between the optical fiber and titanium layer, as well as a good quality of nickel coating without visible dendritic growth. These results indicate that the Ti-Ag-Ni coated RG sensors can be successfully fabricated by combining magnetron sputtering with electroplating, and provide the great potential for high-temperature sensing because of their good sensitivity, repeatability and stability.
机译:通过磁控溅射和电镀工艺制造了具有钛(Ti)-银(Ag)-镍(Ni)多层涂层的再生光栅(RG)传感器。进行光学和热测试以评估Ti-Ag-Ni涂层RG传感器的特性。 RG的反射光谱的轮廓受金属化过程的影响很小。 Ti-Ag-Ni涂层的RG传感器的布拉格波长的变化可以描述为温度的分段线性函数,在250°C时具有不连续的斜率。 Ti-Ag-Ni涂层的RG传感器的灵敏度是裸RG的两倍以上,在高达600°C的温度下具有令人满意的重复性和稳定性。用扫描电子显微镜(SEM)观察传感器的表面和横截面。清晰的SEM图像显示在光纤和钛层之间的界面处没有不连续现象,并且镍镀层的质量很好,没有可见的树枝状生长。这些结果表明,通过将磁控溅射与电镀相结合,可以成功地制造出Ti-Ag-Ni涂层的RG传感器,并且由于其良好的灵敏度,可重复性和稳定性,为高温传感提供了巨大的潜力。

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