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Fabrication and thermal characteristics of multilayer metal-coated regenerated grating sensors for high-temperature sensing

机译:用于高温传感的多层金属涂层再生光栅传感器的制造和热特性

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Health monitoring of components operating at high temperatures requires the development of new sensors to measure temperature and deformation. A regenerated grating (RG) sensor with titanium (Ti)-silver (Ag)-nickel (Ni) multilayer coatings is fabricated by magnetron sputtering and electroplating processes. Optical and thermal tests are performed to evaluate the characteristics of the Ti-Ag-Ni-coated RG sensor. The shapes of the reflection spectra for the RG are slightly affected by the metallization process. The Ti-Ag-Ni-coated RG sensor exhibits a higher sensitivity than that of the bare RG for temperatures up to 600 ° C, with good repeatability and stability. It is verified that the titanium coating can achieve good adhesion to the optical fiber and that the silver coating is suitable as a conductive layer for electroplating. An analytical model for the axial strain and radial strain in a multilayer metal-coated optical fiber is proposed. Comparisons of the experimental results and the theoretical predictions show a good agreement below 250 ° C. These results indicate that multilayer metal-coated RG sensors can be successfully fabricated by combining magnetron sputtering with electroplating and provide great potential for high-temperature sensing.
机译:对在高温下运行的组件进行健康监控需要开发新的传感器来测量温度和变形。通过磁控溅射和电镀工艺制造了具有钛(Ti)-银(Ag)-镍(Ni)多层涂层的再生光栅(RG)传感器。进行光学和热测试以评估Ti-Ag-Ni涂层RG传感器的特性。 RG的反射光谱的形状受金属化过程的影响很小。 Ti-Ag-Ni涂层的RG传感器在高达600°C的温度下具有比裸RG更高的灵敏度,并具有良好的重复性和稳定性。证实了钛涂层可以对光纤具有良好的粘附性,并且银涂层适合用作电镀的导电层。提出了一种多层金属包覆光纤的轴向应变和径向应变的解析模型。实验结果和理论预测值的比较表明在250°C以下具有良好的一致性。这些结果表明,可以通过将磁控溅射与电镀相结合来成功地制造多层金属涂层的RG传感器,并为高温感测提供了巨大的潜力。

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