Piezoelectric material has been widely used as the actuator of the positioning scanner in an atomic force microscope (AFM) since the invention of the AFM [1]. It has been used not only in academic instrumentation, but in commercial AFM products because of its simplicity in structure, and thes possibility to move it continuously on the nanometer scale. However, it has also been associated with hysteresis and creep errors that prevented conventional AFMs from providing an accurate topography of a sample. Park has now developed the Park NX10 featuring a very low noise Z sensor that enables the true topography AFM scanning of a sample.
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