True three-dimensional surface topography imaging with AFM

摘要

The paper presents a method, developed for AFM metrology, for accurate imaging of three-dimensional surface topography, through correction of the vertical drift. The method can be applied to any AFM scanner system. True surface topography is calculated based on two images taken mutually orthogonal with scanning directions. Topography calculation is done automatically, by own developed software. A preliminary investigation was carried out, involving tests on software gauges and profiling on a spherical surface. The potential of the method was proved and improvements in radius of curvature evaluation are presented.