Development of an optical stylus displacement sensor for surface profiling instruments

摘要

The main cause of irrational results from measurements made with optical stylus instruments is speckle noise in the reflected light. To reduce or eliminate speckle noise, we developed a new optical stylus profiling system consisting of a displacement measuring part using a knife-edge and a speckle noise measurement part. Using this new system, we measured profiles of machined materials. The results show that the new system can eliminate speckle noise and can achieve a level of measurement accuracy as high as that of a contact stylus instrument.