A comparison of precision optical displacement sensors for the 3D measurement of complex surface profiles

摘要

Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications, such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings and recommend sensor selection based on parameters, including measurement area, time and resolution. (c) 2007 Elsevier B.V. All rights reserved.