A method to grow branched carbon nanostructures arrays is presented. We employ the electron-beam-induced deposition method using a transmission electron microscope in poor vacuum conditions where hydrocarbons are present in the chamber. The hydrocarbons are attracted to the substrates by the local electric fields. Saw-tooth nano-patterns were made with a focused ion beam in porous silicon substrates with high porosity in order to create sites with high-local electric fields. We found that the adequate ion dose to create well-defined saw-tooth nano-patterns was between 8 and 10 nC/μm~2. Raman and electron energy-loss spectroscopy on the branched carbon nanostructures show a high concentration of sp~2 sites suggesting that they are made of graphite-like hydrogenated amorphous carbon. Selected area electron diffraction, high-resolution images and energy dispersive X-ray analysis (EDS) are also presented.
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