【24h】

High-accuracy interferometric measurements of flatness and parallelism of a step gauge

机译:高精度干涉测量仪的阶梯度和平行度

获取原文
获取原文并翻译 | 示例
           

摘要

The most commonly used method in the calibration of step gauges is the coordinate measuring machine (CMM), equipped with a laser interferometer for the highest accuracy. This paper describes a modification to a length-bar measuring machine for the calibration of step gauges to a high accuracy. A system was also developed for interferometric measurements of the flatness and parallelism of gauge block faces for use in uncertainty calculations.
机译:校准步距表最常用的方法是坐标测量机(CMM),其配备了激光干涉仪,可实现最高的精度。本文介绍了对长度杆测量机的一种改进,用于对步距计进行高精度校准。还开发了用于量规块面的平面度和平行度的干涉测量的系统,用于不确定度计算。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号