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Advances in interferometric length measurements of short gauge blocks

机译:短规格块的干涉式长度测量的进展

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摘要

A system of interferometric length measurements has been realized that supports wringing and phase change errors of ~1 nm. In this system, special reference blocks allowing reproducible wringing are used to find the relation between optical and mechanical lengths. The optical length of a reference block is found by the double-sided method on a quartz plate. The mechanical length is found by the combination of the reproducible wringing and slave-block techniques. A comparison of these two length values gives the phase change at the optical reflection, which is then used to find the mechanical length from the double-sided measurement results of a block of arbitrary length (up to 100 nm). The proposed system makes it possible to measure the phase change difference between the blocks with sub-nanometre accuracy. The system can be used for the practical realization of an alternative definition of the length of a material artefact, based on the perpendicular distance between its mechanical surfaces. Precise measurements of the excessive thickness of the wringing film, which is included in the present definition of the length of a block, are demonstrated. Standard single-sided measurements on quartz are shown to have some additional uncertainty relative to standard measurements on steel plates.
机译:已经实现了一种干涉式长度测量系统,该系统支持〜1 nm的扭曲和相变误差。在该系统中,使用特殊的参考块(允许可重复的拧紧)来查找光学长度和机械长度之间的关系。参考块的光学长度通过双面方法在石英板上找到。机械长度是通过可复制的拧紧和从动块技术相结合而得出的。通过比较这两个长度值,可以得出光反射时的相位变化,然后将其用于从任意长度(最大100 nm)的块的双面测量结果中找到机械长度。所提出的系统使得可以以亚纳米精度测量块之间的相变差。该系统可用于根据其机械表面之间的垂直距离实际实现材料制品长度的替代定义。示出了对拧紧膜的过量厚度的精确测量,该过度测量包括在块的长度的当前定义中。与在钢板上进行标准测量相比,在石英上进行标准单面测量显示出一些其他不确定性。

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