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High-accuracy optical measurement of flatness for large objects

机译:大型物体平面度的高精度光学测量

摘要

A high-accuracy non-contact optomechanical system has been designed for measuring the surface profile of relatively flat and large objects. The experimental set-up consists of a motorized gantry, a rangefinder, a CCD chip and a laser diode. This set-up permits discrete measurements to be performed on objects with a maximum plane surface area of 2.6 × 0.5 m2 along both the X and Y axes. Experiments were carried out on carbon sandwich panels. An uncertainty of ±8 µm has been obtained on flat and smooth surfaces; a ±30 µm uncertainty has been determined for a rough carbon sandwich panel.
机译:设计了一种高精度非接触式光学机械系统,用于测量相对平坦和较大物体的表面轮廓。实验装置包括电动龙门,测距仪,CCD芯片和激光二极管。这种设置允许在X和Y轴上对最大平面表面积为2.6×0.5 m2的对象执行离散测量。在碳夹芯板上进行实验。在平坦和光滑的表面上获得的不确定度为±8 µm;对于粗糙的碳夹芯板,已经确定了±30 µm的不确定度。

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