Laserhyphen;enhanced plasma anodization

摘要

The enhancement of the growth rate of Al2O3has been observed during plasma anodization accompanied by optical excitation with lowhyphen;power visible argonhyphen;ion laser light. The increase of the current efficiency with light is approximately 20percnt; of the efficiency without it. This enhancement of the oxide growth rate is considered to arise from promoting the generation rate of atomic oxygen, which contributes to the anodization as oxidizing species, in the plasma sheath near the specimen and/or on the specimen surface irradiated by the laser light. Although most of the atomic oxygen is regarded to be generated by the dissociation of molecular oxygens colliding with plasma electrons, the laser excitation might help the cumulative dissociation of molecular oxygens.