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首页> 外文期刊>Materials science in semiconductor processing >Influences of post-annealing temperature on the structural and electrical properties of mixed oxides (CuFeO2 and CuFe2O4) thin films prepared by spray pyrolysis technique
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Influences of post-annealing temperature on the structural and electrical properties of mixed oxides (CuFeO2 and CuFe2O4) thin films prepared by spray pyrolysis technique

机译:后退火温度对喷雾热解法制备的混合氧化物(CuFeO2和CuFe2O4)薄膜的结构和电性能的影响

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P-type mixed oxides (CuFeO2 and CuFe2O4) transparent conducting thin films have been successfully deposited on p-type Si (111) substrates at 450 degrees C by spray pyrolysis deposition (SPD) and annealed at 800 degrees C for 2 h. The crystal structure, surface morphology and electrical property have been investigated. It is observed that the CuFeO2 and CuFe2O4 thin films as deposited and annealed, have polycrystalline hexagonal structure and the crystallite size increases by annealing processes. The electrical property of the Ni/CuFeO2/Si Metal-Semiconductor-Metal (MSM) photo detectors was investigated using the current-voltage (I-V) measurements. The barrier heights OB of Ni/CuFeO2/Ni MSM thin films of as deposited and annealed on Si substrates were calculated and its values are 0.478, 0.345 eV, respectively with an applied bias voltage of 3 V. (C) 2015 Elsevier Ltd. All rights reserved.
机译:P型混合氧化物(CuFeO2和CuFe2O4)透明导电薄膜已通过喷雾热解沉积(SPD)在450摄氏度下成功沉积在p型Si(111)衬底上,并在800摄氏度下退火2小时。研究了晶体结构,表面形态和电性能。观察到,沉积并退火的CuFeO 2和CuFe 2 O 4薄膜具有多晶六边形结构,并且通过退火工艺增加了晶粒尺寸。使用电流-电压(I-V)测量研究了Ni / CuFeO2 / Si金属-半导体-金属(MSM)光电探测器的电性能。计算了在Si衬底上沉积和退火的Ni / CuFeO2 / Ni MSM薄膜的势垒高度OB,其值分别为0.478、0.345 eV(施加3 V偏压)。(C)2015 Elsevier Ltd.版权所有。

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