Structural and electrical resistivity characteristics of vacuum arc ion deposited zirconium nitride thin films

摘要

Zirconium nitride (ZrN) thin films were grown on glass and aluminum substrates using a dual cathodic arc ion deposition technique. The effects of various negative bias voltages and flow ratios of N-2/Ar on the stoichiometric ratio of nitrogen to zirconium (N/Zr), deposition rate, structure, surface morphology and electrical resistivity of the ZrN layer were investigated. Rutherford backscattering spectroscopy measurements indicated a drop in the deposition rate and a slight increase in stoichiometric ratio (N/Zr) with the increase of bias voltage up to 400 V, although the latter still remained slightly less than unity (similar to 0.92). Deposition rate of the film showed an increase with the argon addition. X-ray diffraction patterns depicted mostly polycrystalline nature of the films, with preferential orientation of (2 0 0) planes in the -100 V to -300 V bias voltage range. For 70-50% nitrogen and at a bias voltage of -400 V, the (1 1 1) orientation of ZrN film predominated. The films were smoother at a lower bias of -100 V, while the roughness increased slightly at a higher bias voltage possibly due to (increased) preferential re-sputtering of zirconium-rich clusters/islands. Changes in the resistivity of the films were correlated with stoichiometry, crystallographic orientation and crystalline quality. (C) 2014 Elsevier Ltd. All rights reserved.