Extracting electron backscattering coefficients from backscattered electron micrographs

摘要

Electron backscattering micrographs possess the so-called Z-contrast, carrying information about the chemical compositions of phases present in microstructures. The intensity at a particular point in the backscattered electron micrograph is proportional to the signal detected at a corresponding point in the scan raster, which is, in turn, proportional to the electron backscattering coefficient of a phase at that point. This article introduces a simple method for extracting the electron backscattering coefficients of phases present in the microstructure, from the backscattered electron micrographs. This method is able to convert the micrograph's greyscale to the backscattering-coefficient-scale. The prerequisite involves the known backscattering coefficients for two phases in the micrograph. In this way, backscattering coefficients of other phases can be determined. The method is unable to determine the chemical compositions of phases or the presence of an element only from analysing the backscattered electron micrograph. Nevertheless, this method was found to be very powerful when combined with energy dispersive spectroscopy, and the calculations of backscattering coefficients.