Backscattered electron density determining device for detecting local deformations in materials, has electron-optical device functioning as lens or non-planar reflector for increasing divergence of backscattered electron path

摘要

The device includes an electron source connected to an electron-optical device for irradiating electrons onto a predetermined region of material. At least one electron-optical device (f) functions as a lens and/or non-planar reflector and increases the divergence of the backscattered electron path (c) in a predetermined angular range in accordance with a given function. The state of an electron-sensitive detector screen (d) is recorded using e.g. a screen recording device (e).