Fabrication of Nano-Sized ITO Powder from Waste ITO Target by Spray Pyrolysis Process

摘要

In this study, a nano-sized ITO powder with the average particle size below 50 nm by using waste ITO target is generated by spray pyrolysis proces. This study also examines the influences of reaction parameters such as reaction temperature, concentration and inflow speed of raw material solution on the properties of the generated ITO powder. As the reaction temperature increases from 800 deg C to 1100 deg C, the average particle size of the generated ITO powder increases from 40 nm to 100 nm, the microstructure gradually becomes compact, the particle size distribution becomes increasingly irregular, the XRD peak intensity gradually increases, and the specific surface area decreases. When the concentration of the solution is at 50 g/L, the average particle size of the ITO powder is below 30 nm, and the particle size distribution appears comparatively uniform. As the concentration reaches 400 g/L, which is close to the saturated concentration, the particle size distribution appears extremely irregular, and the particles with the size ranging from 20 nm to 100 nm coexist. Along with the rise of concentration, the XRD peak intensity gradually increases, yet the specific surface area decreases. As the inflow speed of the raw material solution increases from 2 mL/min to 100 mL/min, the average particle size of the ITO powder increases from 30 nm to 90 nm, yet the particle size distribution becomes irregular, and individual particles appear in the distinct shape of polygon. Along with the rise of inflow speed, the XRD peak intensity gradually increases, and the specific surface area decreases.