The Effects of Reaction Factors on the Fabrication of Nano-Sized Indium Tin Oxide Powder by Spray Pyrolysis Process

摘要

In this study, waste ITO target is dissolved into hydrochloric acid to generate a complex acid solution. Nano-sized ITO powder with the average particle size below 50 nm is generated from this complex solution by spray pyrolysis process. This study also examines the influences of reaction parameters such as nozzle tip size and air pressure on the properties of the generated ITO powder. When the nozzle tip size is at 1 mm, the particle size distribution becomes more uniform in contrast to the case of other tip sizes, and the average particle size is around 50 nm. When the nozzle tip size increases up to 5 mm, the average particle size increases slightly, yet the particle size distribution becomes extremely irregular. Along with the change of nozzle tip size, the changing tendencies of XRD peak intensity and specific surface area are almost consistent with that of average particle size. Along with the increase of air pressure, the average particle size of the ITO powder gradually decreases, and the particle size distribution becomes more uniform. When the air pressure is at 0.1 kg/cm~2, the particle size distribution appears extremely irregular, yet the average particle size is around 70 nm. When the air pressure is at 3 kg/cm~2, the average particle size decreases down to 40 nm. Along with the increase of air pressure, the XRD peak intensity gradually decreases and the specific surface area increases.