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首页> 外文期刊>Magnetohydrodynamics >UNSTEADY 3D AND ANALYTICAL ANALYSIS OF SEGREGATION PROCESS IN FLOATING ZONE SILICON SINGLE CRYSTAL GROWTH
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UNSTEADY 3D AND ANALYTICAL ANALYSIS OF SEGREGATION PROCESS IN FLOATING ZONE SILICON SINGLE CRYSTAL GROWTH

机译:漂浮区硅单晶生长过程中的非定常3D分析与分析

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摘要

3D unsteady numerical calculations of velocity, temperature and dopant concentration fields in the molten zone in Floating Zone (FZ) Si single crystal growth process using a HF magnetic field are carried out. The recorded fluctuations of physical fields near the crystallization interface are used to estimate the possible fluctuations of the crystal growth rate. Analytical estimation of the amplitude of concentration oscillations due to changing local crystal growth rate is carried out.
机译:进行了使用HF磁场在FZ硅单晶生长过程中熔融区的速度,温度和掺杂剂浓度场的3D非稳态数值计算。所记录的靠近结晶界面的物理场波动用于估计晶体生长速率的可能波动。对由于局部晶体生长速率变化而引起的浓度振荡幅度进行了分析估计。

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