Preparation and Properties of PbTiO_3/(Pb_(1-x)La_x)TiO_3/PbTiO_3 Multi-Layer Films by RF Magnetron Sputtering

摘要

Highly (100)-oriented PbTiO_3/(Pb_(0.90)La_(0.10))Ti_(0.975)O_3/PbTiO_3 multi-layer films were prepared on the PbO_x/Pt(111)/Ti/SiO_2/Si(100) substrates at the temperature of 600 deg C by RF magnetron sputtering. The thickness of PbO_x buffer layer plays a significant role on the phase purity, and the PbTiO_3 layer plays an important role in improving the properties of the multi-layer films. Highly (100)-orientated PbTiO_3/(Pb_(0.90)La_(0.10))Ti_(0.975)O_3/PbTiO_3 multi-layer film possesses good ferroelectric properties with remnant polarization 2P_r = 44.1 mu C/cm~2. The pyroelectric coefficient of the film at room-temperature is 2.425 X 10~(-8) C/cm~2.K. The results indicated that the highly (100)-oriented PbTiO_3/(Pb_(0.90)La_(0.10)Ti_(0.975)O_3/PbTiO_3 film possesses larger remnant polarization together with larger pyroelectric coefficient at room temperature.