Relaxor Ferroelectric Polymers, Thin Film Devices, and Ink-Jet Microprinting for Thin Film Device Fabrication

摘要

The relaxor ferroelectric polymer, based on poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) (P(VDF-TrFE-CFE)) terpolymer, exhibits high electromechanical response and dielectric response, suitable for a wide range of army applications such as micro-actuators, high efficiency pulse power capacitors, and solid state cooling devices-Recent experimental results show that with a simple blends approach, the terpolymer glass transition temperature can be raised quite markedly, resulting in a significant increase in the elastic modulus and consequently the elastic energy density, while the polarization response and electrostrictive strain remaining nearly the same. Utilizing the high electromechanical response, thin film microactuators arid micropwnps were fabricated, which showed very high microactuator displacement and force capability in comparison with the traditionalpiezoceramic based microdevices. Ink-jet microprinting technique was investigated for the fabrication of thin film devices and with a proper-control of the solution conditions and surface chemistry, thin films with feature size down to less than 30 mu m can be fabricated.