Liquid Crystal Alignment Effects Using a-C:H Thin Films Deposited at RF Bias Condition

摘要

The nematic liquid crystal (NLC) aligning capabilities using a-C:H thin film deposited at the three kinds of rf bias condition were investigated. A high pretilt angle of about 11° by the ion beam alignment method was observed on the a-C:H thin film (polymer-like carbon) deposited at 1 W if bias condition, and the low pretilt angle the NLC than 1 W'rf bias conditions was observed on the a-C:H thin film (diamond-like carbon) deposited at if 30 W and 60 W bias condition. Consequently, the high LC pretilt angle and the good aligning capabilities of LC alignment by the ion beam alignment method on the a-C:H thin film deposited at 1 W if bisa condition can be achieved. Also, the good thermal stability of LC alignment by the IB alignment method on the a-C:H thin film as working gas at if bias condition can be achieved.