Oxyfluoride Glass-Ceramic Composites for Low Temperature Co-Fired Ceramic Substrate

摘要

A series of glass-ceramic composites based on CaF_2-AlF_3-SiO_2 oxyfluoride glass and Al_2O_3 ceramic were prepared. The effects of AI_2O_3 content on sintering behaviors, phase composition, microstructure and dielectric properties were investigated. The results show that the composites had low sintering temperature (approx 800 deg C), low dielectric constant (5.5-6.6), low dielectric loss (<0.002), low thermal expansion coefficient (4.9-5.7 ppm/deg C), and enough flexural strength (120-250 MPa). The results above indicated that this series of oxyfluoride glass-ceramics were a promising candidate for low temperature co-fired ceramic substrate application.