Communication-Realization of DC Bias Reliability by 7-Zone JTE Termination Technology

摘要

A graded junction termination extension (JTE) is proposed to suppress the variation of avalanche voltages for SiC power devices. A 7-zone JTE was investigated to realize the concept of the graded JTE. Avalanche voltages higher than 3,880 V were expected in the range of interface charge densities from 0 to 8.0 x 10(12) cm(-2). Both breakdown voltages higher than 4,000 V and bias stability after a 1,000 hr stress test were successfully achieved. (C) 2016 The Electrochemical Society. All rights reserved.