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Control and design of crystal growth furnace

机译:晶体生长炉的控制与设计

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摘要

We present the control and design of a vertical transparent multizone furnace which can operate in the temperature range of 25-750℃ and deliver thermal gradients of 2-45℃/cm for the commercial applications to crystal growth. A multivariableprojective control algorithm is used for the temperature control. The controller accounts for the inevitable zone to zone thermal interactions. In addition, the control system operates such that the thermal profile is maintained under the thermal load ofcrystal, thus boundary conditions on crystal growth ampoules can be predetermined prior to crystal growth. Temperature profiles for the growth of crystals via directional solidification, vapor transport techniques, and multiple gradient applications canbe easily implemented. The unique feature of its transparency and stable thermal profiles make the furnace useful for the determination of process parameters that optimize crystal growth conditions.
机译:我们介绍了垂直透明多区熔炉的控制和设计,该熔炉可在25-750℃的温度范围内运行,并提供2-45℃/ cm的热梯度,可用于晶体生长的商业应用。多变量投影控制算法用于温度控制。控制器考虑了不可避免的区域间热相互作用。另外,控制系统的操作使得在晶体的热负荷下保持热分布,因此可以在晶体生长之前预先确定晶体生长安瓿的边界条件。通过定向凝固,蒸汽传输技术和多重梯度应用,晶体生长的温度曲线很容易实现。其透明性和稳定的热特性的独特特征使该炉可用于确定可优化晶体生长条件的工艺参数。

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