This paper presents the results of the effects of macrostress, crystallographic texture and thickness measurements on the reliability of thin ceramic coatings. It considers specifity of stress measurements concerned with thin coatings. It gives the equations for calculations of the texture contribution to the 'sin~2' #PSI# method for the basic anisotropic elasticity theory. It is shown that the discrepancy of thermal expansion coefficients for substrate, coating and technology parameters determines the sign and level of residual macrostresses and quality of coating. An X-ray fluorescence method has been developed for nonstandard thickness measurements of thin coatings. It considers the limita-tions and accuracy of the fluorescence method for various substrates and coating materials.
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