The charged particles transport behavior of the nitrogen plasma ion source with monte carlo simulation

摘要

A Monte Carlo simulation was presented to describe the electrons and heavy particles (e~-, N~+_2, N~+, N_2f, N_f) transport behaviors in the nitrogen glow discharge which happened between the two drilled electrodes of the plasma ion source. The probability of various electron-molecule collision process, the average energy and exit angle distribution of outgoing particles were calculated in different E/N. The results showed that they followed Boltzmann distribution approximately. Along with E/N increasing, the electron and the heavy particle average energy and the probability of electric excitation, dissociation, ionization, dissociative ionization collisions were increased. Comparing to the uniform electric field distribution, the ionization rate and the electron average energy would be enhanced obviously in the nonuniform electric field.