INFLUENCE OF TUNGSTEN CONTENT IN W-DLC NANOCOMPOSITE THIN FILMS PREPARED BY HYBRID TARGET BIASED ION BEAM ASSISTED DEPOSITION TECHNIQUE

摘要

Tungsten incorporated diamond like carbon nanocomposite films were deposited onto Si substrate by using target biased ion beam assisted deposition. The effect of W target bias voltage on the chemical bonding, structure, surface morphology and mechanical properties of DLC films were investigated by means of XPS, Raman spectroscopy, AFM and Nanoindentation. It was found that the content of W in the films increased from 6 at.% to 13.7 at.% due to the increase in target bias voltage from -300 V to -700 V. XPS analysis revealed that most of the tungsten starts to react with carbon to form WC nanoparticles. Raman analysis shows that with the increase of W fraction in the DLC matrix, the intensity ratio I_D/I_G, increases and the G band shifts to higher wavenumber. Thus it proves that the incorporation of tungsten leads to increase in sp~2 hybridized carbon content, and hence decrease in the hardness of W-DLC films compared to that of the pure DLC films. The result of AFM indicates that the surface roughness of the DLC gets modified with the incorporation of tungsten.