A Source of Broad Electron Beams with a Self-Heated Hollow Cathode for Plasma Nitriding of Stainless Steel

摘要

The principle of operation and characteristics of a broad electron beam source based on the discharge with a self-heated hollow cathode and widened anode part are described. The source is intended for the ion nitriding of metals in the electron beam plasma. The influence of the current density (1 - 7 mA/cm~2) and ion energy (0.1 - 0.3 keV) on the nitriding rate of the 12X18H10T austenitic stainless steel is studied. It is shown that the maximal nitriding rate is reached by the combining of the minimal bias voltage across the samples (100 V) and maximal ion current density, which ensures the dynamic oxide layer sputtering on the sample surface. The electron source, in which electrons are extracted through a stabilizing grid in the direction normal to the axis of the hollow cathode, ensures the radially divergent electron beam formation with a 700-cm~2 initial cross section, a current of up to 30 A, and initial electron energy of 0.1 - 0.5 keV. The source stably operates at nitrogen - argon mixture pressures of up to 3 Pa.