Generation of Gas Discharge Plasma by an Arc Source with a Cold Hollow Cathode

摘要

The results from a study of an arc plasma source with a cold hollow cathode are presented. The source generates plasma with a density of ～10{sup}10 cm{sup}(-3) in a volume of ～0.2 m{sup}3 at discharge currents of up to 150 A, an arc discharge operating voltage of 30 - 40 V, and a low pressure of 0.1 - 1 Pa. The motion of the cathode spot in the crossed electric and magnetic fields inside the hollow cathode and the cathode's special design make it possible to eliminate almost completely the penetration of the sputtered cathode material into the working vacuum chamber.