Finite element modeling of nanoindentation to extract load-displacement characteristics of bulk materials and thin films

摘要

The finite element modeling (FEM) technique has been applied to study the loading-unloading characteristics, stress and strain fields of the bulk materials such as titanium, iron, copper and thin films of titanium and copper subjected to Berkovich nanoindentation process. The loading and unloading curves obtained from numerical simulation results are compared with the curves obtained earlier through the experimental results and a good agreement has been found. The substrate effect is ignored and only thin film behaviour under indentation is considered. The thin films are indented within 5% thickness, rather than 10% rule of thumb.