'Material Handling System And Monitoring System And Monitoring Method For Particles In Traveling Area Of Overhead Hoist Transfers' in Patent Application Approval Process (USPTO 20230138019)

摘要

The following quote was obtained by the news editors from the background information suppliedby the inventors: “Semiconductor manufacturing has very strict requirements on cleanliness, and theenvironmental cleanliness in a wafer factory is 1,000, that is, there shall be no more than 1,000 particleswith a diameter of 0.1 mm D 0.3 mm in 1 m~3 space. The requirements for the internal environment of aprocess machine are even more stringent, with a cleanliness of 10. Thus, it is very important to test andcontrol particles in semiconductor industry. A traditional automatic material handling system comprisesoverhead hoist transfers (OHT) and tracks, and traveling wheels of each OHT move along the tracks tohandle wafers. In order to ensure cleanliness, the tracks and the OHTs are generally cleaned on a regularbasis or in case of fault alarm.”