Relationship between sensitivity and waveguide position on the diaphragm in integrated optic pressure sensors based on the elasto-optic effect

摘要

The sensitivities of integrated optic pressure sensors with diaphragms theoretically are known to be strongly dependent on the position of the sensing waveguide on the diaphragm. According to the theoretical results, the diaphragm edge is the best position for the waveguide of a sensor based on the elasto-optic effect. The relationship between sensitivity and the waveguide position, however, has not been investigated experimentally, although it is important in the designing of such a sensor and in determining the misalignment tolerance of the sensing waveguide. In this study, this relationship in a glass-based integrated optic sensor by use of an intermodal interference was examined experimentally.