Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer

摘要

In photometric ellipsometry the optical signal is transformed into an electrical signal by a photodetector, and it passes an electronic system to reduce the noise and to amplify the signal. But inherently it will induce a phase shift. and an amplitude attenuation of the output signal. Such a specific characteristic of an electronic system depends on the angular frequency of the signal and gives systematic errors to the results of the measurement of rotating-analyzer ellipsometry. We propose a modified method of measurement that enables us to calibrate the electronic system in the ellipsometric measurement configuration. (C) 1997 Optical Society of America.