Post-Calibration Correction for Rotating-Analyzer Ellipsometer with Optical FiberBundle Detection System

摘要

Spectroscopic ellipsometry with a rotating-analyzer operated without a dark roomis examined. The effect of the residual linear polarization at the output of an optical fiber bundle upon the ellipsometric constants is critically analyzed. The fraction of the linear polarization and the rotation angle of the polarization axis inside the optical fiber are the two key elements of the post-calibration correction. The spectral dependence of the calibration constants is corrected. Spectroscopic, Ellipsometry, Optical fiber bundle.