Fabrication and characterization of polymeric optical by plasma fluorination process

摘要

The fabrication and characterization of planar polymeric waveguides produced on silicon substrate for optical devices is reported. The cladding was made of a fluorinated polymer by CHF3 plasma polymerization and the core was a PMMA film prepared by spin coating. The polymeric waveguides with different widths (from 10 to 100 mu m) were patterned by UV photolithography. The plasma fluorinated optical films were characterized by ellipsometry, metricon prism coupler, interferometer and FTIR-ATR. The waveguide optical characterization was done by coupling a laser beam, fiber-to-fiber coupling method, using a multimode optical fiber. (C) 2014 Elsevier GmbH. All rights reserved.