An array of SiGe nanodisks with Ge quantum dots on bulk Si substrates demonstrating a unique light-matter interaction associated with dual coupling

摘要

Si-Based microdisks with Ge quantum dots (QDs) have been of great interest due to their potential as the desired light source for monolithic optical-electronic integrated circuits (MOEICs), as well as in the studies of cavity quantum electrodynamics (CQED). Here, we report on unique SiGe nanodisk arrays with embedded Ge QDs directly realized on bulk Si substrates. Their superior optoelectronic properties are demonstrated by remarkably enhanced photoluminescence due to the coupling between QD emissions and cavity modes of the nanodisk, even though the size of the nanodisk is much smaller than the wavelengths of cavity modes. Moreover, spectral shifts of cavity modes and an intensity modulation related to the interference of in-phase emissions from QDs in the nanodisk array are observed due to alternative coupling between nanodisks. A hybridized mode, originating from the spectral overlap between the anapole mode of individual nanodisks and the guided mode of periodic nanodisks, results in strong luminescence even at room temperature. Our results shed new light on the fundamental physics of CQED in nanodisk arrays with embedded QDs. Given their superior optoelectronic properties, the feasibility of carrier injection and thermal dissipation through the Si pedestal, the presented SiGe nanodisks with embedded Ge QDs will have great potential for application in innovative optoelectronic devices, particularly as the light source for MOEICs.