Fine tuning an aberration corrected ADF-STEM

摘要

Aberration correctors offer greatly enhanced resolution in electron microscopes, however can require dramatically more complicated adjustments. A method of computer adjustment of a probe forming aberration corrector in a Scanning Transmission Electron Microscope (STEM) is proposed and analyzed using image simulation. This method works directly with the image and should work well with crystalline specimens. It does not have a significant dependence on post specimen lens aberrations. (c) 2017 Elsevier B.V. All rights reserved.