Study of the effect of ionization conditions on the characteristics of the ion beam formed by an electron impact ion source

摘要

Geometrical parameters of the ion beam leaving the ionization chamber of an electron impact ion source have been experimentally studied as a function of gas pressure, ionization voltage, ionization electron current and extraction electrode diaphragm geometry. The experimental results show that the angular distributions of the ion beam emerging from the ionization chamber little depend on the parameters listed above in a wide range of their values.