An electron impact ionization source device, an ionization impact method, and a substance analysis method, the device comprising: radial acceleration electrodes (612) placed on an inner side of an electron repeller (603) near to an ionization chamber (601), and above and below or in front of and behind a first filament (602), an electric field perpendicular to the direction of a magnetic field being formed between the radial acceleration electrodes (612). Electrons emitted by means of the first filament (602) when same is heated take on a spiral motion under the force of the magnetic field direction, and the radius of the spiral of the motion of the electrons increases under the force of the electric field perpendicular to the direction of the magnetic field, thereby increasing the actual movement path of the electrons and increasing the cross-sectional area of collision between the electrons and molecules of a substance being tested, thereby improving the ionization efficiency of the ionization source.
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