Iridium tip, gas field ionization ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion electron composite beam apparatus, scanning probe microscope, and mask correction apparatus

摘要

There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with 210 orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.