IRIDIUM TIP, GAS FIELD ION SOURCE, FOCUSED ION BEAM APPARATUS, ELECTRON SOURCE, ELECTRON MICROSCOPE, ELECTRON BEAM APPLIED ANALYZER, ION ELECTRON BEAM COMPOSITE APPARATUS, SCANNING PROBE MICROSCOPE AND MASK CORRECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pyramid structure of an iridium tip with a single atom at the tip, which can be produced with a high positional repeatability, and to allow the single atom at the tip to be able to hold for a long period of time while preventing adhesion of impurity.;SOLUTION: The iridium tip has a pyramid structure having a sharpened tip part of monocrystal of 210 orientation. The tip is composed of only a single iridium atom of a {210} crystal plane which is enclosed by one {100} crystal plane and two {111} crystal planes. On the first layer, the single iridium atom is positioned to form the tip of the pyramid structure. On the second layer immediately below the first layer, three iridium atoms are positioned to form apex of a triangle. On the third layer immediately below the second layer, six iridium atoms are positioned at the apexes and sides of a triangle.;COPYRIGHT: (C)2015,JPO&INPIT