Получение　　и　　исследование　　тонких　　пленок　　нитрида　　бора

摘要

It is shown the basic possibility of thin BN filmsproducing as a result of reaction between boron compounds andammonia products of decomposition in RF-discharge. Effect ofpressure of reagent gases and electric discharge parameters onthe composition, thickness and structure of the thin films is investigated.