The Front-Wing Conductive Probe Applied to Electrical Scanning Probe Microscopy

摘要

Electrical scanning probe microscopy (E-SPM) is one of the well-known techniques applying to the nano-characterizations of electronic materials and devices. Unfortunately, photoperturbation induced by atomic force microscopy (AFM) laser beam could lead to false E-SPM images and the related spectroscopy, resulting in many difficulties in synchronously obtaining electrical images and the corresponding AFM images. The front-wing structure of the cantilever can effectively inhibit the optical perturbation in the electrical scanning probe microscopes and obviously promote the analysis accuracy thereof. In this work, we demonstrated the influences of photoperturbation on E-SPM characterization. The applications of the front-wing conductive probe on E-SPM are also illustrated with examples.