Development of Scanning Probe Microscopy at the Institute of Physics in Academia Sinica

摘要

After many years of effort at the Institute of Physics in Academia Sinica, we have successfully developed scanning tunneling microscopy, atomic force microscopy, and several other related nanotechnologies. In this article, our development history is briefly reviewed, and the functions and schematics of our instruments are presented. We also show several images taken by our microscopes and provide discussions on them. Now we are actively developing our second-generation commercial scanning probe microscopes. Through the development of these technologies, we hope to cooperate with other scientists and engineers to broaden the current technologies to an unexplored horizon, and to even bring forth new technologies and industries.