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METHOD OF TUNING PARAMETER SETTINGS FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY FOR SUBSURFACE IMAGING, SCANNING PROBE MICROSCOPY SYSTEM, AND COMPUTER PROGRAM PRODUCT
METHOD OF TUNING PARAMETER SETTINGS FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY FOR SUBSURFACE IMAGING, SCANNING PROBE MICROSCOPY SYSTEM, AND COMPUTER PROGRAM PRODUCT
This document relates to a method of tuning a scanning probe microscopy system and system therefore. The system comprising a sample carrier and a probe with a probe tip, and is configured for positioning the probe tip relative to a sample. The system further includes a transducer, a sensor for sensing probe tip vibrations, and a controller. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to the sample; b) at a first position of the probe tip, controlling the transducer to sweep the first frequency across a first frequency range, and obtaining a first probe tip sensor signal; c) at a second position of the probe tip, controlling the transducer to sweep the first frequency across at least said first frequency range, and obtaining a second probe tip sensor signal; d) analyzing the first and second sensor signal to obtain a difference characteristic dependent on the first frequency, and selecting a first frequency value for which the difference characteristic exceeds a threshold for tuning the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.
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