Electron Energy Loss Spectroscopy Technique: Analysis Application in Nano-Scale Materials

摘要

Field-emission transmission electron microscopy (FE-TEM) coupling with energy filter provides high spatial resolution and 2-D energy image-spectrum. A three dimensional distribution of material specific properties can be reconstructed by extracting the energy loss spectrum from electron spectroscopic imaging series (ESI). Based on the analysis theory of function transfer and digital signal process, the energy resolution of spectrum-image can be improved down to 0.1 eV by using maximum entropy deconvolution technique. Consequentially, material dielectric function, energy band gap and electronic structure image with a high spatial resolution can be obtained by using the discussed techniques.