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Fabrication and implementation of large-area organic light-emittingdiode devices on direct patterned backplanes

机译:直接图案化背板上的大面积有机发光二极管器件的制作和实现

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摘要

In this paper, we report on a new cost-effective fabrication technology for large-area organic lightemitting diode (OLED) devices that we have developed. We fabricated OLED lighting devices on a directly patterned backplane using a dry process without employing conventional photolithography patterning technology. The indiumetin-oxide (ITO) anode, metal cathode, insulator, and emissive organic layer patterns were all formed directly on the substrates during the sputtering and evaporation steps by using a shadow mask without using etching or lift-off methods. We fabricated and characterized green phosphorescent emission OLED devices with an emission area of 30 × 120 mm~2, based on backplanes formed by direct patterning technology. Application of direct patterning technology reduced the total number of processing steps to 4 from the 26 steps required by conventional photo-patterning technology, making it possible to reduce large-scale production cost. Although the process steps were reduced considerably, the typical characteristics were comparable to those of photo-patterned OLEDs. Furthermore, the lifetime of the OLEDs based on direct patterned backplane was observed to be 27,200 h, which is approximately 97% of the lifetime of conventionally patterned OLEDs.
机译:在本文中,我们报告了一种针对我们开发的大面积有机发光二极管(OLED)器件的具有成本效益的新制造技术。我们使用干燥工艺在直接图案化的背板上制作了OLED照明设备,而没有采用传统的光刻图案化技术。氧化铟锡(ITO)阳极,金属阴极,绝缘体和发光有机层图案均在不进行蚀刻或剥离方法的情况下,通过使用荫罩在溅射和蒸发步骤中直接形成在基板上。我们基于直接图案化技术形成的背板,制造并表征了发射面积为30×120 mm〜2的绿色磷光发光OLED器件。直接图案化技术的应用将处理步骤的总数从传统的光图案化技术所需的26个步骤减少到4个,从而有可能降低大规模生产成本。尽管工艺步骤大大减少,但典型特性与光图案化OLED相当。此外,观察到基于直接图案化的背板的OLED的寿命为27,200 h,约为传统图案化OLED的寿命的97%。

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