テラヘルツ帯フレキシブル検査デバイスと非破壊検査応用

摘要

Nondestructive inspections with terahertz (THz) frequency waves are expected to play a critical role to ensure product reliability and safety. By utilizing the flexibility of carbon nanotube (CNT) films, we developed a flexible THz sensing device and demonstrated multi-view nondestructive inspections without bulky measurement systems. This paper explains three relevant topics: 1) a flexible THz sensing device based on CNT film, 2) chemical doping and a thermal device design to enhance detection sensitivity, and 3) multi-view and wearable THz nondestructive inspections.