A Method to Improve Electrical Properties of BiFeO3 Thin Films

摘要

A method is used to improve the electrical properties of BiFeO3 thin films by modifying the Bi content in ceramic targets, where all thin films were prepared on SrRuO3/Pt/TiO2/SiO2/Si(l00) substrates by radio frequency sputtering. The Bi content in the ceramic target strongly affects the electrical properties of BiFeO3 thin films. BiFeO3 thin films prepared by using the ceramic target of Bi/Fe ≈ 1.15 with a molar ratio demonstrate a low leakage current density and a low dielectric loss. Moreover, a larger remanent polarization of 2P_r≈ 167.6 μC/cm~2 is also demonstrated for the BiFeO3 thin films prepared by using the ceramic target of Bi/Fe ≈ 1.15, together with an improved fatigue behavior. Therefore, it is an effective way to improve the electrical properties of bismuth ferrite thin films by modifying the Bi content in ceramic targets.