Mg_(0.58)Zn_(0.42)O Thin Films on MgO Substrates with MgO Buffer Layer

摘要

Cubic Mg_(0.58)Zn_(0.42)O thin films with (100) orientation were grown on cubic MgO substrates. The band gap of the alloy films corresponds to solar blind band. In the case that a MgO buffer layer was employed, the surface roughness was decreased from 38 to 1.6 nm under the same growth conditions. A metal-semiconductor-metal phocodetector based on this MgZnO film was fabricated, which showed a low dark current of 0.16 pA and lower sub-bandgap photoresponse than the ones with rougher surface in our early reports.